Development and characterization of new liquid metal ion sources


Development and characterization of new liquid metal ion sources

Bischoff, L.; Pilz, W.; Tajmar, M.

In the last decades liquid metal ion sources (LMIS) working in focused ion beam (FIB) systems became an irrecoverable instrument in research and industry [1]. Sample preparation, local ion implantation and ion analysis are the main application topics. Most of the systems are equipped with a gallium LMIS. But, modern trends in nanotechnology require more extended properties like variable ion species for local doping, non-contaminating milling at higher rates or the application of focused cluster beams for surface modifications [2]. LMIS are also used for space propulsion as precision thrusters to provide ultrastable attitude and orbit control for satellites called Field-Emission- Electric-Propulsion [3].
In this contribution the basics of LMIS operation, the measurement of the main parameters and so the characterization of this type of ion sources will be presented. Moreover, the application of new source concepts including prototypes will be shown. At present about half of the periodic table can be provided as single or double charged ions as well as heavy cluster ions up to five atoms per ion by alloy LMIS. This provokes the interest to apply such sources not only in focused ion beam systems but also in high energy single-end ion accelerators. A first concept for an injector module to adapt a high current LMIS with integrated mass separation to a high energy ion beam system will be presented and discussed.

The authors would like to thank BMBF for financial support under Projekt 05K130DC: "Verbundprojekt 05K2013 – Ioneninduzierte Materialanalyse/-modifizierung: Modifizierung und in-situ Analyse von Materialien durch mittelenergetische Ionenbestrahlung. TP 1: Ultraschwere Ionen und deren Nutzung an HZDR-Beschleunigern."

[1] L. Bischoff, R. Böttger, P. Philipp and B. Schmidt, Nanostructures by mass-separated FIB, Book chapter in “FIB Nanostructures” in “Lecture Notes in Nanoscale Science and Technology” ed. Z. Wang, Peking, Berlin: Springer, 2013, Vol. 20, 465.
[2] L. Bischoff, K.-H. Heinig, B. Schmidt, S. Facsko and W. Pilz, Nucl. Instr. and Meth. B 2012, 272 198.
[3] M. Tajmar, I. Vasiljevich and W. Grienauer, Ultramicroscopy 2010, 111, 1.

Keywords: Liquid metal ion source; cluster; single-end ion accelerators

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  • Lecture (Conference)
    Workshop Ionenstrahlen & Nanostrukturen, 20.-22.07.2014, Paderborn, Deutschland

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Publ.-Id: 20899