Ion beam synthesis: a novel method of producing (SiC)1-x(AIN)x layers


Ion beam synthesis: a novel method of producing (SiC)1-x(AIN)x layers

Yankov, R. A.; Fukarek, W.; Hatzopoulos, N.; Voelskow, M.; Kreißig, U.; Brauer, G.; Anwand, W.; Heera, V.; Skorupa, W.

  • Mat. Sci. Forum 264-268 (1998) 753
  • Lecture (Conference)
    Int. Conf. on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, Aug. 31 - Sept. 5, 1997

Permalink: https://www.hzdr.de/publications/Publ-2194
Publ.-Id: 2194