Defects remaining in MeV-ion-implanted Si away from the peak of the nuclear energy deposition

Defects remaining in MeV-ion-implanted Si away from the peak of the nuclear energy deposition

Kögler, R.; Yankov, R. A.; Posselt, M.; Danilin, A.; Skorupa, W.

• Lecture (Conference)
  E-MRS´98, Strasbourg, June 16-19, 1998

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