Theoretical and experimental studies of (AIN)(1-x)(SiC)xlayer structures formed by N+ and Al+ co-implantation 6H-SiC


Theoretical and experimental studies of (AIN)(1-x)(SiC)xlayer structures formed by N+ and Al+ co-implantation 6H-SiC

Kulikov, A. V.; Pezoldt, J.; Rybin, P. V.; Skorupa, W.; Trushin, Y. V.; Yankov, R. A.

  • Lecture (Conference)
    Int.Workshop Nondestructive Testing and Computer Simulations in Science and Engineering, E 2, St. Petersburg, Russia, June 8 - 12, 1998

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Publ.-Id: 2248