Structural and compositional characterisation of N+ and Al+ co-implanted 6H-SiC using optical methods


Structural and compositional characterisation of N+ and Al+ co-implanted 6H-SiC using optical methods

Pezoldt, J.; Yankov, R. A.; Fukarek, W.; Mücklich, A.; Fontaine, F.; Skorupa, W.; Werninghaus, T.; Zahn, D.

  • Lecture (Conference)
    9th Europ. Conf. on Diamond, Diamond-like Materials, Nitrides, and Silicon Carbide, Crete, Greece, Sept. 13-18, 1998

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Publ.-Id: 2266