Similarity of energetic depositions of cubic boron nitride and titanium nitride thin films

Similarity of energetic depositions of cubic boron nitride and titanium nitride thin films

Wang, X.; Kolitsch, A.; Zhao, J. P.; Möller, W.

• Lecture (Conference)
  MRS Fall Meeting 1998, Boston, USA, Nov. 30 - Dec.4, 1998

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