Amorphization and crystallization effects in high-dose zinc-implanted silicon


Amorphization and crystallization effects in high-dose zinc-implanted silicon

Kalitzova, M.; Simov, S.; Yankov, R. A.; Angelov, C.; Vitali, G.; Rossi, M.; Pizzuto, C.; Zollo, G.; Fauré, J.; Killian, K.; Bonhomme, P.; Voelskow, M.

  • J. Appl. Phys. 81 (1997) 1143

Permalink: https://www.hzdr.de/publications/Publ-2323
Publ.-Id: 2323