TEM characterization of carbon ion implantation into epitaxial Si1-xGex


TEM characterization of carbon ion implantation into epitaxial Si1-xGex

Romano-Rodriguez, A.; Perez-Rodriguez, A.; Serre, C.; Calvo-Barrio, L.; Bachrouri, A.; Gonzalez-Varona, O.; Morante, J. R.; Kögler, R.; Skorupa, W.

  • Contribution to external collection
    Inst. Phys. Conf. Ser. 157 (1997) 419
  • Lecture (Conference)
    Int. Conf. on Microscopy of Semiconducting Materials, Oxford, England, April 1997

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Publ.-Id: 2343