Aluminium implantation of p-SiC for ohmic contacts
Aluminium implantation of p-SiC for ohmic contacts
Spieß, L.; Nennewitz, O.; Weishart, H.; Lindner, J.; Skorupa, W.; Romanus, H.; Erler, F.; Petzoldt, J.
- Diamond and Rel. Mat. 6 (1997) 1414
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Publ.-Id: 2353