Aluminium implantation of p-SiC for ohmic contacts


Aluminium implantation of p-SiC for ohmic contacts

Spieß, L.; Nennewitz, O.; Weishart, H.; Lindner, J.; Skorupa, W.; Romanus, H.; Erler, F.; Petzoldt, J.

  • Diamond and Rel. Mat. 6 (1997) 1414

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Publ.-Id: 2353