Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA


Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Behrisch, R.; Grigull, S.; Kreißig, U.; Grötzschel, R.

  • Lecture (Conference)
    13th Int. Conf. on Ion Beam Analysis (IBA-13), Lisboa, Portugal, Aug. 1997

Permalink: https://www.hzdr.de/publications/Publ-2367
Publ.-Id: 2367