Metal gettering by defective regions in carbon-implanted silicon


Metal gettering by defective regions in carbon-implanted silicon

Kögler, R.; Kaschny, J. R.; Yankov, R. A.; Skorupa, W.; Werner, P.; Danilin, A. B.

  • Lecture (Conference)
    7th Int. Conf. on Gettering and Defect Engineering in Semiconductor Technology, GADEST'97, Spa, Belgium, Oct. 5 - 10, 1997

Permalink: https://www.hzdr.de/publications/Publ-2407
Publ.-Id: 2407