Metal gettering by defective regions in carbon-implanted silicon
Metal gettering by defective regions in carbon-implanted silicon
Kögler, R.; Kaschny, J. R.; Yankov, R. A.; Skorupa, W.; Werner, P.; Danilin, A. B.
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Lecture (Conference)
7th Int. Conf. on Gettering and Defect Engineering in Semiconductor Technology, GADEST'97, Spa, Belgium, Oct. 5 - 10, 1997
Permalink: https://www.hzdr.de/publications/Publ-2407
Publ.-Id: 2407