Direct measurements of high-energy secondary electrons during plasma immersion ion implantation


Direct measurements of high-energy secondary electrons during plasma immersion ion implantation

Nakamura, K.; Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.

  • Lecture (Conference)
    3rd Int. Conf. Reactive Plasmas, Nara, Japan, Jan. 21 - 24, 1997

Permalink: https://www.hzdr.de/publications/Publ-2435
Publ.-Id: 2435