Direct measurements of high-energy secondary electrons during plasma immersion ion implantation
Direct measurements of high-energy secondary electrons during plasma immersion ion implantation
Nakamura, K.; Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.
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Lecture (Conference)
3rd Int. Conf. Reactive Plasmas, Nara, Japan, Jan. 21 - 24, 1997
Permalink: https://www.hzdr.de/publications/Publ-2435
Publ.-Id: 2435