Defectengineering and gettering by high energy implantation into Silicon
Defectengineering and gettering by high energy implantation into Silicon
Skorupa, W.
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Lecture (others)
Center for Analysis of Substances, Moscow, Russia, May 26, 1997
Permalink: https://www.hzdr.de/publications/Publ-2517
Publ.-Id: 2517