Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) structures: what getters what, where and how
Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) structures: what getters what, where and how
Yankov, R. A.
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Lecture (others)
Bell Labs, Lucent Technologies, Murray Hill, NJ, USA, Dec. 8, 1997
Permalink: https://www.hzdr.de/publications/Publ-2535
Publ.-Id: 2535