Ion beam synthesis by high dose tungsten implantation into 6H-SiC


Ion beam synthesis by high dose tungsten implantation into 6H-SiC

Weishart, H.; Schöneich, J.; Voelskow, M.; Skorupa, W.

  • Contribution to external collection
    MRS Symp. Proc. 438 (1997) 283

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Publ.-Id: 2680