Ion beam synthesis by high dose tungsten implantation into 6H-SiC
Ion beam synthesis by high dose tungsten implantation into 6H-SiC
Weishart, H.; Schöneich, J.; Voelskow, M.; Skorupa, W.
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Contribution to external collection
MRS Symp. Proc. 438 (1997) 283
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Publ.-Id: 2680