Computer-simulation and RBS/C studies of high-dose N+ and Al+ co-implantation in 6H-SiC


Computer-simulation and RBS/C studies of high-dose N+ and Al+ co-implantation in 6H-SiC

Yankov, R. A.; Voelskow, M.; Kreißig, U.; Kulikov, D. V.; Pezoldt, J.; Skorupa, W.; Trushin, Y.; Kharlamov, V. S.; Tsigankov, D. N.

  • Techn. Phys. Lett. 23 (1997) 617 (Russian version - Pis'ma v ZhTF 23 (No 16) (1997) 6)

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Publ.-Id: 2701