Ion Beam synthesis by tungsten-Implantation into 6H-SiC
Ion Beam synthesis by tungsten-Implantation into 6H-SiC
Weishart, H.; Steffen, H. J.; Skorupa, W.; Schöneich, J.; Matz, W.
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Poster
MRS 1994 Fall Meeting, 28.11-2.12.1994, Boston, Symposium A, Mat. Res. Soc. Symp. Proc. 354 (1995) 177 -
Contribution to proceedings
MRS 1994 Fall Meeting, 28.11-2.12.1994, Boston, Symposium A, Beam-Solid Interactions for Materials Synthesis and Characterization 354(1995) 177-182
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Publ.-Id: 279