Ion Beam synthesis by tungsten-Implantation into 6H-SiC


Ion Beam synthesis by tungsten-Implantation into 6H-SiC

Weishart, H.; Steffen, H. J.; Skorupa, W.; Schöneich, J.; Matz, W.

  • Poster
    MRS 1994 Fall Meeting, 28.11-2.12.1994, Boston, Symposium A, Mat. Res. Soc. Symp. Proc. 354 (1995) 177
  • Contribution to proceedings
    MRS 1994 Fall Meeting, 28.11-2.12.1994, Boston, Symposium A, Beam-Solid Interactions for Materials Synthesis and Characterization 354(1995) 177-182

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Publ.-Id: 279