Development of a dedicated system for Scanning Transmission Helium Ion Microscopy


Development of a dedicated system for Scanning Transmission Helium Ion Microscopy

Serralta, E.; Klingner, N.; Hlawacek, G.

The helium ion microscope has already proven its value for high-resolution imaging, compositional analyses, nanofabrication, and materials modification. However, imaging in transmission mode remains not fully explored. A Gas Field Ion Source Microscope (GFISM) is being modified for studying scanning transmission helium ion images at the 10 to 30 keV energy range with a nanometer-sized probe. Employing a new position-sensitive and time-resolved detector will enable the exploration of several imaging modes, such as bright- and dark-field, channeling, and possibly diffraction. Ion-energy loss spectrometry (IELS) using time-of-flight can also be performed by combining an ultra-fast beam blanker system with time-resolved detection. Details about the setup and results of SRIM simulations revealing the properties of the transmitted particles will be presented.
This work has been supported by the H2020 Project npSCOPE under grant number 720964 and the FNR STHIM project under grant number 17748.

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  • Lecture (Conference)
    Advances in Gas-Ion Microscopy - The Second International Meeting of The PicoFIB Network, 13.02.2019, London, United Kingdom

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Publ.-Id: 28422