Flash Lamp Annealing: From Basics to Applications


Flash Lamp Annealing: From Basics to Applications

Rebohle, L.; Prucnal, S.; Reichel, D.

The work gives a detailed introduction to the technology of flash lamp annealing, the corresponding physical background and an overview of the various applications of flash lamp annealing found in literature. It discusses a couple of issues which are relevant for process management with the focus on temperature measurement and temperature simulation. The application-related chapters include, inter alia, ultra-shallow junctions and hyperdoping in silicon, doping and superconductivity in germanium, silicon carbide, III-V semiconductors, diluted magnetic semiconductors, the crystallization of thin amorphous silicon films, semiconductor nanostructures, high-k materials, flash lamp annealing for monocrystalline, polycrystalline and thin film solar cells, transparent conducting oxides and flexible substrates.

Keywords: Thermal processing; semiconductors; flash lamp annealing; thin films; millisecond annealing

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Publ.-Id: 29200