Focused ion beam materials modification with noble gas ions


Focused ion beam materials modification with noble gas ions

Hlawacek, G.

I will present results obtained using Helium Ion Microscopy (HIM) [1] in various nanostructuring projects. The common goal of the research is to change the electronic or magnetic properties of the target material at the nano-scale in a controlled way to achieve new functionality. Where applicable this new functionality will be measured in-situ during the nanostructure fabrication process.
For all presented examples the critical length scale of the nanostructure is smaller or in the range of collision cascade.
This size regime can not easily be accessed with traditional broad beam based ion irradiation and holds many promises but also challenges that need to be overcome to enable new device concepts and new functional materials on the nano-scale.

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  • Invited lecture (Conferences)
    IISC23, 20.11.2019, Matsue, Japan

Permalink: https://www.hzdr.de/publications/Publ-30532
Publ.-Id: 30532