Mechanically shapeable magnetic field sensor technologies

Extending 2D structures into 3D space has become a general trend in multiple disciplines, including electronics, photonics, plasmonics and magnetics. This approach provides means to modify conventional or to launch novel functionalities by tailoring curvature and 3D shape. We study fundamentals of 3D curved magnetic thin films [1] and explore their application potential for flexible electronics, eMobility and health. For these applications, we developed a technology platform known as shapeable magnetoelectronics [2], which relies on a smart combination of ultrathin polymeric foils and metallic thin films featuring magnetoresistive and Hall effects. The mechanically compliant magnetic field sensors are designed and fabricated to address the specific needs of different applications including automotive (monitoring and control of electrical machines and drives) [3-5], biosensing technologies (flexible microfluidic devices) [6,7], consumer electronics (interactive printed electronics) [8,9], orientation in space [10] as well as virtual and augmented reality devices (motion tracking and touchless human-machine interaction) [10-13].
In this presentation, we will review the approaches to fabricate mechanically shapeable magnetic field sensors as well as their magnetoresistive and mechanical performance. On the application side, we will focus on the demonstration of the shapeable sensor devices for the emerging technological fields of smart skins, soft robotics and human-machine interfaces.

[1] R. Streubel, D. Makarov et al.: Magnetism in curved geometries. Journal of Physics D: Applied Physics (Topical Review) 49, 363001 (2016).
[2] D. Makarov et al.: Shapeable magnetoelectronics. Applied Physics Reviews 3, 011101 (2016).
[3] M. Melzer, D. Makarov et al.: Wearable magnetic field sensors for flexible electronics. Advanced Materials 27, 1274 (2015).
[4] D. Ernst, D. Makarov et al.: Packaging technologies for (ultra-)thin sensor applications in active magnetic bearings. IEEE Proceedings of the 37th International Spring Seminar on Electronics Technology (ISSE), pp. 125-129 (2014). doi:10.1109/ISSE.2014.6887577
[5] I.J. Mönch, D. Makarov et al.: Flexible Hall sensorics for flux based control of magnetic levitation. IEEE Trans. Magn. 51, 4004004 (2015).
[6] G. Lin, D. Makarov et al.: Magnetic sensing platform technologies for biomedical applications. Lab Chip 17, 1884 (2017).
[7] G. Lin, D. Makarov et al.: A highly flexible and compact magnetoresistive analytic device. Lab Chip 14, 4050 (2014).
[8] D. Makarov et al.: Printable magnetoelectronics. ChemPhysChem 14, 1771 (2013).
[9] D. Karnaushenko, D. Makarov et al.: High-performance magnetic sensorics for printable and flexible electronics. Advanced Materials 27, 880 (2015).
[10] G. S. Cañón Bermúdez, D. Makarov et al.: Electronic-skin compasses for geomagnetic field driven artificial magnetoception and interactive electronics. Nature Electronics 1, 589 (2018).
[11] G. S. Cañón Bermúdez, D. Makarov et al.: Magnetosensitive e-skins with directional perception for augmented reality. Science Advances 4, eaao2623 (2018).
[12] J. Ge, D. Makarov et al.: A bimodal soft electronic skin for tactile and touchless interaction in real time. Nature Communications 10, 4405 (2019).
[13] P. N. Granell, D. Makarov et al.: Highly compliant planar Hall effect sensor with sub 200 nT sensitivity. npj Flexible Electronics 3, 3 (2019).