Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5
Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5
Engelmann, H.-J.
Project Leader: von Borany, Johannes
Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration
ROBIS: 32129 has used this (Id 32276) publication of HZDR-primary research data
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Reseach data in the HZDR data repository RODARE
Publication date: 2021-02-09 Open access
DOI: 10.14278/rodare.806
Versions: 10.14278/rodare.807
License: CC-BY-4.0
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Publ.-Id: 32276