Influence of polytypism on elementary processes of ion-beam-induced defect production in SiC


Influence of polytypism on elementary processes of ion-beam-induced defect production in SiC

Posselt, M.; Belko, V.; Chagarov, E.

Informations can be requested. Email: M.Posselt@fz-rossendorf.de

  • Lecture (Conference)
    International Workshop of the European Network on Defect Engineering of Advanced Semiconductor Devices, Kista-Stockholm, Sweden, June 27-29, 2000
  • Lecture (Conference)
    5th International Conference on Computer Simulation of Radiation Effects in Solids, Penn State University, State College, USA, July 24-28, 2000

Permalink: https://www.hzdr.de/publications/Publ-3444
Publ.-Id: 3444