Reciprocal Space Mapping of Silicon Implanted with Nitrogen and Carbon by PIII


Reciprocal Space Mapping of Silicon Implanted with Nitrogen and Carbon by PIII

Abramof, E.; Beloto, A. F.; Ueda, M.; Guenzel, R.; Reuther, H.

Reciprocal Space Mapping was performed on Silicon Implanted with Nitrogen and Carbon by
PIII

  • Lecture (Conference)
    Conference on Ion Beam Modification of Materials 2000, Rio Grande do Sul, Brazil, 3.-8. Sept.2000

Permalink: https://www.hzdr.de/publications/Publ-3562
Publ.-Id: 3562