Reciprocal Space Mapping of Silicon Implanted with Nitrogen and Carbon by PIII
Reciprocal Space Mapping of Silicon Implanted with Nitrogen and Carbon by PIII
Abramof, E.; Beloto, A. F.; Ueda, M.; Guenzel, R.; Reuther, H.
Reciprocal Space Mapping was performed on Silicon Implanted with Nitrogen and Carbon by
PIII
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Lecture (Conference)
Conference on Ion Beam Modification of Materials 2000, Rio Grande do Sul, Brazil, 3.-8. Sept.2000
Permalink: https://www.hzdr.de/publications/Publ-3562
Publ.-Id: 3562