Electrochemical Etch Stop Behaviour on Ion Implanted Silicon pn-Junctions
Electrochemical Etch Stop Behaviour on Ion Implanted Silicon pn-Junctions
Schmidt, B.
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Lecture (Conference)
Micro System Technologies Russia, 21.-24 Juni 1993, St. Petersburg
Permalink: https://www.hzdr.de/publications/Publ-43
Publ.-Id: 43