Emitter doping of silicon solar cells by phosphorous plasma-immersion ion implantation
Emitter doping of silicon solar cells by phosphorous plasma-immersion ion implantation
von Borany, J.
Keywords: Solar cells; Doping; Si-technology; Plasma ion implantation
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Lecture (others)
Universität Konstanz, Jan. 11, 2001
Permalink: https://www.hzdr.de/publications/Publ-4639
Publ.-Id: 4639