Emitter doping of silicon solar cells by phosphorous plasma-immersion ion implantation


Emitter doping of silicon solar cells by phosphorous plasma-immersion ion implantation

von Borany, J.

Keywords: Solar cells; Doping; Si-technology; Plasma ion implantation

  • Lecture (others)
    Universität Konstanz, Jan. 11, 2001

Permalink: https://www.hzdr.de/publications/Publ-4639
Publ.-Id: 4639