Integrated high voltage modulator for plasma immersion ion implantation with an RF plasma


Integrated high voltage modulator for plasma immersion ion implantation with an RF plasma

Rogozin, A. I.; Astrelin, V. T.; Richter, E.; Möller, W.

The present investigation focuses on further development of the plasma based high voltage modulator for plasma immersion ion implantation (PIII) devices. The modulator produces high voltage pulses using grid controlled extraction of electrons from the plasma, which is used for the ion implantation. The operation features of the modulator in connection with an RF-plasma are described. The device is applied to implantations of stainless steel. The results indicate considerable hardness improvement, which confirm the practical use of the high voltage modulator.

Keywords: Plasma immersion ion implantation; High voltage modulation; RF-plasma

  • Plasma Sources Science and Technology 12 (2003) 495-499

Permalink: https://www.hzdr.de/publications/Publ-4794
Publ.-Id: 4794