Si-nanocrystal memory devices prepared by r.f. magnetron sputtering.


Si-nanocrystal memory devices prepared by r.f. magnetron sputtering.

Schmidt, J. U.; Schmidt, B.

kein Abstrakt

Keywords: Si nanocrystal memory; photoluminescence; infrared spectroscopy; electrical testing

  • Poster
    MRS Conference, Fall 2002, Boston, USA

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Publ.-Id: 5103