Annealing effects on silicon oxynitride layer synthesized by N plasma immersion ion implantation
Annealing effects on silicon oxynitride layer synthesized by N plasma immersion ion implantation
Ueda, M.; Reuther, H.; Beloto, A. F.; Kuranaga, C.; Abramof, E.
Annealing effects on silicon oxynitride layer synthesized by N plasma immersion ion implantation
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Lecture (Conference)
20th International Conference on Amorphous and Microcrystalline Semiconductors - Science and Technology, Campos do Jordao, Brasilien, 25 - 29.9.2003 - IEEE Transactions on Plasma Science 34(2006)4, 1080-1083
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Publ.-Id: 5912