CoSi2 nanowires synthesized by FIB


CoSi2 nanowires synthesized by FIB

Bischoff, L.; Schmidt, B.; Akhmadaliev, C.

Nanowires and chains of nanoparticles are of emerging interest in nanoelectronics, nano-optics and plasmonics as well as for their monolithic integration into microelectronic devices. CoSi2 is a promising material due to its CMOS-compatibility microelectronics technology. Two fabrication methods of CoSi2 -nanowires by using ion beam synthesis (IBS) with Focused Ion Beams (FIB) technique are presented. In a first approach, an oxide layer, structured by sputtering with a focused Ga+ ion beam, have been used as an implantation mask for large area homogeneous Co+ implantation. Alternatively, a mass separated FIB of cobalt ions, emitted from a Co36Nd64 alloy liquid metal ion source, is applied for a direct writing IBS process. Implantation into Si with doubly charged Co+ ions emitted from the Co source allows ion energies up to 60 keV, which result in CoSi2 nanostructures buried in silicon. The processes of damaging and annealing of the substrate due to extremely high current density of the FIB were investigated. The fabrication of nanowires down to 30 nm diameter has been demonstrated.

Keywords: nano-wire; Focused Ion Beam; cobaltdisilicide

  • Poster
    Tagung der Deutschen Physikalischen Gesellschaft 03. - 09. 03. 2005 Berlin

Permalink: https://www.hzdr.de/publications/Publ-6832
Publ.-Id: 6832