Plasma Immersion Ion Implantation Under Industrially Relevant Conditions

Plasma Immersion Ion Implantation Under Industrially Relevant Conditions

Ueda, M.; Wei, R.; Reuther, H.

• Invited lecture (Conferences)
  The Second International Workshop on Particle Beams &Plasma Interaction on Material and, 25.11.2004, Chiang Mai, Thailand

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