Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface


Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface

Castro, R. M.; Ueda, M.; Oliveira, R. M.; Reuther, H.; Morena, B. L. D.

Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface

  • Lecture (Conference)
    8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil

Permalink: https://www.hzdr.de/publications/Publ-7890
Publ.-Id: 7890