A solid-state compact pulser of 5kV/2A/5kHz for surface treatment by plasma immersion ion implantation
A solid-state compact pulser of 5kV/2A/5kHz for surface treatment by plasma immersion ion implantation
Rossi, J. O.; Ueda, M.; Silva, G.; Reuther, H.
A solid-state compact pulser of 5kV/2A/5kHz for surface treatment by plasma immersion ion implantation
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Lecture (Conference)
8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil
Permalink: https://www.hzdr.de/publications/Publ-7892
