The growth and microstructure of magnetron sputtered Ti2AlN MAX phase thin films characterized by in-situ x-ray diffraction


The growth and microstructure of magnetron sputtered Ti2AlN MAX phase thin films characterized by in-situ x-ray diffraction

Beckers, M.; Schell, N.; Martins, R. M. S.; Mücklich, A.; Möller, W.

Kein Abstract vorhanden.

  • Lecture (Conference)
    14th International Summer School on Vacuum, Electron and Ion Technologies (VEIT), 12.-16.09.2005, Sunny Beach, Bulgaria

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Publ.-Id: 8281