Nanostructures by ion beams
Nanostructures by ion beams
Schmidt, B.
Ion beam techniques, including conventional broad beam ion implantation, ion beam synthesis and ion irradiation of thin layers as well as local ion implantation with fine-focused ion beams (FIB) have been applied in different fields of micro- and nanotechnology. The ion beam synthesis of nanoparticels in high dose ion implanted solids is explained as phase separation of nanostructures from a super-saturated solid state through precipitation and Ostwaldripening during subsequent thermal treatment of the ion implanted samples. A special topic will be addressed to self-organization processes of nanoparticles during ion irradiation of flat and curved solid state interfaces. As an example of silicon nanocrystal application the fabrication of silicon nanocrystal non-volatile memories will be described. Finally, the fabrication possibilities of nanostructures, like nanowires and chains of nanoparticles (e.g. CoSi2), by ion beam synthesis using a focused Co+ ion beam will be demonstrated and possible applications will be mentioned.
Keywords: Ion implantation; Ion beam synthesis; Ion irradiation; nanoclusters; nanowires
-
Radiation Effects and Defects in Solids 162(2007)3-4, 171-184
DOI: 10.1080/10420150601132743
ISSN: 1042-0150
Cited 11 times in Scopus -
Invited lecture (Conferences)
Workshop on Ion Beam Studies of Nanomaterials: Synthesis, Modification and Characterization, 26.06.-01.07.2006, Trieste, Italy
Permalink: https://www.hzdr.de/publications/Publ-8674
Publ.-Id: 8674