Implantation and growth of large Beta-FeSi2 precipitates and Alpha-FeSi2 network structures in silicon


Implantation and growth of large Beta-FeSi2 precipitates and Alpha-FeSi2 network structures in silicon

Reuther, H.; Dobler, M.

Permalink: https://www.hzdr.de/publications/Publ-874
Publ.-Id: 874