Implantation and growth of large Beta-FeSi2 precipitates and Alpha-FeSi2 network structures in silicon
Implantation and growth of large Beta-FeSi2 precipitates and Alpha-FeSi2 network structures in silicon
Reuther, H.; Dobler, M.
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Applied Physics Letters 69 (1996) 21 pp. 3176-3178
DOI: 10.1063/1.117952
Cited 12 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-874
Publ.-Id: 874