Ion beam induced crystallization of 6H-SiC


Ion beam induced crystallization of 6H-SiC

Heera, V.; Kögler, R.; Skorupa, W.; Stoemenos, J.

  • Book (Authorship)
    Institute of Physics Conference Series No 142: Chapter 3, pp. 533-536, Silicon Carbide and Related Materials 1995 Conf., Kyoto, Japan, c 1996 IOP Pub.

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Publ.-Id: 884