Role of hydrogen ions in plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry

Role of hydrogen ions in plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry

von Keudell, A.; Jacob, W.; Fukarek, W.

• Applied Physics Letters 66 (1995) 11 pp. 1322-1324
  DOI: 10.1063/1.113229
  Cited 38 times in Scopus

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