Roughness Improvement and Hardness Enhancement in Nanoscale Al/AlN Multilayered Thin Films


Roughness Improvement and Hardness Enhancement in Nanoscale Al/AlN Multilayered Thin Films

Wang, X.; Kolitsch, A.; Möller, W.

Permalink: https://www.hzdr.de/publications/Publ-922
Publ.-Id: 922