Photoluminescence of Er doped SiO2 films embedded Si nanoclusters using dual implantation chamber and annealing


Photoluminescence of Er doped SiO2 films embedded Si nanoclusters using dual implantation chamber and annealing

Cheng, X. Q.; Sun, J. M.; Kögler, R.; Skorupa, W.; Möller, W.; Prucnal, S.; Zuk, J.

The photoluminescence of Er doped SiO2 films embedded Si nanoclusters is investigated. These clusters are fabricated by dual ion implantation and annealing.

Keywords: Er doped Si nanoclusters; photoluminescence; dual ion implantation

  • Lecture (Conference)
    5th Int. Conf. on Ion Implantation and other Applications of Ions and Electrons (ION2004), 14.-17.06.2004, Kazimierz Dolny, Poland

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Publ.-Id: 9902