Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)


Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)

Ferro, G.; Panknin, P.; Polychroniadis, E. K.; Monteil, Y.; Skorupa, W.; Stoemenos, J.

Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)

Keywords: flash lamp; annealing; SiC

  • Lecture (Conference)
    5th Europ. Conf. Silicon Carbide and Related Materials, 31.08.-04.09.2004, Bologna, Italy

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Publ.-Id: 9906