Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)
Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)
Ferro, G.; Panknin, P.; Polychroniadis, E. K.; Monteil, Y.; Skorupa, W.; Stoemenos, J.
Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)
Keywords: flash lamp; annealing; SiC
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Lecture (Conference)
5th Europ. Conf. Silicon Carbide and Related Materials, 31.08.-04.09.2004, Bologna, Italy
Permalink: https://www.hzdr.de/publications/Publ-9906
Publ.-Id: 9906