Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

The Dresden Super-SIMS is a combination of the DREAMS facility and a CAMECA IMS7f-auto as the ion source, and combines the advantages of both worlds: on one hand the suppression of molecular isobaric background with a 6MV tandem accelerator and on the other the special and depth resolved information about the origin of the measured signals in the sample. This is possible without the samples undergoing any chemical treatment, and a polished surface (< a few nm) is sufficient for the measurement. While former attempts were intended to analyse semiconductor samples, the primary aim of Super-SIMS is the measurement of geological samples.
Nevertheless, first experiments were done with silicon to characterise the system and compare it with former attempts. Several samples
with known content of phosphorus, including the blank, from the former URI-Project (Ultra clean injector) at the Technical University of
Munich were measured. The sample with highest P content was used as internal reference material and the measurements showed a good agreement between measured concentrations by Super-SIMS and URI.