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1 PublikationSub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5
Engelmann, H.-J.
Project Leader: von Borany, Johannes
Abstract
Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32276) publication
- DOI: 10.1016/j.mne.2020.100074 references this (Id 32276) publication
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration
ROBIS: 32129 has used this (Id 32276) publication of HZDR-primary research data
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Forschungsdaten im HZDR-Daten-Repositorium RODARE
Publication date: 2021-02-09 Open access
DOI: 10.14278/rodare.806
Versions: 10.14278/rodare.807
License: CC-BY-4.0
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Permalink: https://www.hzdr.de/publications/Publ-32276