Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Rangelow, I. W.; Ivanov, Tzvon; Ivanova, K.; Volland, B. E.; Grabiec, P.; Sarov, Y.; Persaud, A.; Gotszalk, T.; Zawierucha, P.; Zielony, M.; Dontzov, D.; Schmidt, B.; Zier, M.; Nikolov, N.; Kostic, I.; Engl, W.; Sulzbach, T.; Mielczarski, J.; Kolb, S.; Latimier, Du P.; Pedreau, R.; Djakov, V.; Huq, S. E.; Edinger, K.; Fortagne, O.; Almansa, A.; Blom, H. O.

Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Rangelow, I. W.; Ivanov, T.; Ivanova, K.; Volland, B. E.; Grabiec, P.; Sarov, Y.; Persaud, A.; Gotszalk, T.; Zawierucha, P.; Zielony, M.; Dontzov, D.; Schmidt, B.; Zier, M.; Nikolov, N.; Kostic, I.; Engl, W.; Sulzbach, T.; Mielczarski, J.; Kolb, S.; Latimier, D. P.; Pedreau, R.; Djakov, V.; Huq, S. E.; Edinger, K.; Fortagne, O.; Almansa, A.; Blom, H. O.

A major limitation for future nanotechnology, particularly for bottom-up manufacturing is the non-availability of 2-dimensional massively parallel probe arrays. Scanning proximity probes are uniquely powerful tools for analysis, manipulation and bottom-up synthesis: they are capable of addressing and engineering surfaces at the atomic level and are the key to unlocking the full potential of Nanotechnology. Generic massively parallel intelligent cantilever-probe platforms is demonstrated through a number of existing and ground-breaking techniques. A packaged VLSI NEMS-chip (Very Large Scale Integrated Nano Electro Mechanical System) incorporating 128 proximal probes, fully addressable with control and readout interconnects and advanced software will be presented.

Keywords: nanotechnology; AFM probe arrays

Microelectronic Engineering 84(2007)5-8, 1260-1264
ISSN: 0167-9317

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