Depth Profile Analysis: STEM-EDX versus RBS

Depth Profile Analysis: STEM-EDX versus RBS

Markwitz, A.; Matz, W.; Schmidt, B.; Grötzschel, R.

• Surface and Interface Analysis, Vol. 26, 359-366 (1998)
  DOI: 10.1002/(SICI)1096-9918(19980501)26:5<359::AID-SIA379>3.0.CO;2-Y
  Cited 17 times in Scopus

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