Microstructural Investigation of Ion Beam Synthesized Germanium Nanoclusters Embedded in SiO₂ Layers

Microstructural Investigation of Ion Beam Synthesized Germanium Nanoclusters Embedded in SiO₂ Layers

Markwitz, A.; Schmidt, B.; Matz, W.; Grötzschel, R.; Mücklich, A.

• Nuclear Instruments and Methods in Physics Research B 142 (1998) 338-348
  DOI: 10.1016/S0168-583X(98)00283-3
  Cited 34 times in Scopus

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