Computer Simulation of Ion-Assisted Thin Film Deposition
Computer Simulation of Ion-Assisted Thin Film Deposition
Möller, W.
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Radiation Effects and Defects in Solids, Vol. 141, pp. 73-81
DOI: 10.1080/10420159708211558
Cited 3 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-1103