Hydrogen determination by means of the 1H(19F,α y) 16O and 1H(15N,α y) 12C resonance reactions


Hydrogen determination by means of the 1H(19F,α y) 16O and 1H(15N,α y) 12C resonance reactions

Rudolph, W.; Bauer, C.; Gippner, P.; Grambole, D.; Heiser, C.; Herrmann, F.; Thomas, H.-J.

Hydrogen surface contamination and depth profiles can be measured by the resonant nuclear reactions 1H(19F,α y) 16O and 1H(15N,α y) 12C. The method was applied to study hydrogen-implanted silicon, amorphous silicon layers and silicon oxide films produced by anodic oxidation.

  • Journal of Radioanalytical and Nuclear Chemistry 83(1984)1, 99-105

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