Photothermal measurements of Al+ - and Al+/N+ implanted 6H-SiC

Pezoldt, J.; Teichert, G.; Panknin, D.; Voelskow, M.

Photothermal measurements of Al+ - and Al+/N+ implanted 6H-SiC

Pezoldt, J.; Teichert, G.; Panknin, D.; Voelskow, M.

Thermal wave measurements on 6H-SiC with a particular emphasis on Al+ and Al+/N+ implanted 6H-SiC was carried out. The 6H-SiC wafers were implanted at different substrate temperatures.

Keywords: SiC; implantation; thermal wave measurement

Contribution to proceedings
Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 07.-11.06.1999, St. Petersburg, Russia
Proceedings of the Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, ISSN:0277-786X ( print )

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