Study of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment

Study of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment

Wang, X.; Charlamov, V.; Kolitsch, A.; Posselt, M.; Trushin, Y.; Möller, W.

• Journal of Physics D: Applied Physics 31 (1998) 2241-2244
  DOI: 10.1088/0022-3727/31/18/007
  Cited 8 times in Scopus

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